
分子泵组系列: Hicube Eco 、Hicube Classic、Hicube Pro
分子泵组 Hicube Eco 系列
Pumping station | HiCube 30 Eco | HiCube 80 Eco | HiCube 300 Eco | HiCube 300 H Eco | ||||||
Flange (in) | DN40 KF | DN63 K | DN 63 CF | DN40 KF | DN63 K | DN 63 CF | DN 100 K | DN 100 CF | DN 100 K | DN 100 CF |
Pumping speed for Nitrogen N2 l/s | 22 | 32 | 32 | 35 | 67 | 67 | 260 | 260 | 260 | 260 |
MVP 015-2 | ||||||||||
Ultimate pressure hPa | <1.10-7 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-10 |
Pumping speed backing pump at 50 Hz m3/h | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 |
Weight of pumping station1) kg | 12.1 | 12.1 | 13.3 | 12.5 | 13.9 | 12.5 | 16.3 | 18.8 | 16.3 | 18.3 |
Power consumption W | 170 | 170 | 170 | 170 | 170 | 170 | 270 | 270 | 270 | 270 |
MVP 015-4 | ||||||||||
Ultimate pressure hPa | <1.10-7 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-10 |
Pumping speed backing pump at 50 Hz m3/h | 0.75 | 0.75 | 0.75 | 0.75 | 0.75 | 0.75 | 0.75 | 0.75 | 0.75 | 0.75 |
Weight of pumping station1) kg | 13.8 | 13.8 | 15 | 14.2 | 15.6 | 14.2 | 18 | 20.5 | 18 | 20 |
Power consumption W | 170 | 170 | 170 | 270 | 270 | 270 | 270 | 270 | 270 | 270 |
MVP 030-3 | ||||||||||
Ultimate pressure hPa | <1.10-7 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-10 |
Pumping speed backing pump at 50 Hz m3/h | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 | 1.8 |
Weight of pumping station1) kg | 13.7 | 13.7 | 14.9 | 14.1 | 15.5 | 14.1 | 17.9 | 20.4 | 17.9 | 19.9 |
Power consumption W | 270 | 270 | 270 | 270 | 270 | 270 | 270 | 270 | 270 | 270 |
分子泵组 Hicube Classic 系列
Pumping station | HiCube 80 Classic | HiCube 300 Classic | HiCube 300 H Classic | HiCube 400 Classic | HiCube 700 Classic | |||||
Flange (in) | DN63 K | DN 63 CF | DN 100 K | DN 100 CF | DN 100 K | DN 100 CF | DN 100 K | DN 100 CF | DN 160 K | DN 160 CF |
Pumping speed for nitrogen N2 l/s | 67 | 67 | 260 | 260 | 260 | 260 | 355 | 355 | 685 | 685 |
Rotary vane pump Duo 3 | ||||||||||
Ultimate pressure hPa | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 |
Pumping speed backing pump at 50 Hz m3/h | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 |
Weight of pumping station:1) kg | 42.8 | 44.2 | 47.1 | 49.1 | 46.6 | 48.6 | 52 | 57.9 | 51.9 | 57.8 |
Power consumption W | 310 | 310 | 520 | 520 | 520 | 520 | 630 | 630 | 630 | 630 |
Rotary vane pump Duo 3 M | ||||||||||
Ultimate pressure hPa | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 |
Pumping speed backing pump at 50 Hz m3/h | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 | 2.5 |
Weight of pumping station:1) kg | 43.5 | 44.9 | 47.8 | 49.8 | 47.3 | 49.3 | 52.7 | 58.6 | 52.6 | 58.5 |
Power consumption W | 320 | 320 | 530 | 530 | 530 | 530 | 640 | 640 | 640 | 640 |
Rotary vane pump Duo 6 M | ||||||||||
Ultimate pressure hPa | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 |
Pumping speed backing pump at 50 Hz m3/h | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 |
Weight of pumping station:1) kg | 48.8 | 50.2 | 53.1 | 55.1 | 52.6 | 54.6 | 58 | 63.9 | 57.9 | 63.8 |
Power consumption W | 310 | 310 | 520 | 520 | 520 | 520 | 630 | 630 | 630 | 630 |
Diaphragm pump MVP 040-2 | ||||||||||
Ultimate pressure hPa | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 |
Pumping speed backing pump at 50 Hz m3/h | 2.3 | 2.3 | 2.3 | 2.3 | 2.3 | 2.3 | 2.3 | 2.3 | 2.3 | 2.3 |
Weight pumping station:1) kg | 42.2 | 43.6 | 46.5 | 48.5 | 46 | 48 | 51.4 | 57.3 | 51.3 | 57.2 |
Power consumption W | 530 | 530 | 740 | 740 | 740 | 740 | 850 | 850 | 850 | 850 |
Diaphragm pump MVP 070-3 | ||||||||||
Ultimate pressure hPa | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 | <1.10-7 | <1.10-8 |
Pumping speed backing pump at 50 Hz m3/h | 3.8 | 3.8 | 3.8 | 3.8 | 3.8 | 3.8 | 3.8 | 3.8 | 3.8 | 3.8 |
Weight of pumping station:1) kg | 47.2 | 48.6 | 51.5 | 53.5 | 51 | 53 | 56.4 | 62.3 | 56.3 | 62.2 |
Power consumption W | 790 | 790 | 1000 | 1000 | 1000 | 1000 | 1110 | 1110 | 1110 | 1110 |
分子泵组 Hicube Pro 系列
Pumping station | HiCube 80 Pro | HiCube 300 Pro | HiCube 300 H | Pro HiCube 400 Pro | HiCube 700 Pro | ||||||
Flange (in) | DN40 KF | DN63 K | DN 63 CF | DN 100 K | DN 100 CF | DN 100 K | DN 100 CF | DN 100 K | DN 100 CF | DN 160 K | DN 160 CF |
Pumping speed for nitrogen N2 l/s | 35 | 67 | 67 | 260 | 260 | 260 | 260 | 355 | 355 | 685 | 685 |
Ultimate pressure | |||||||||||
with Multi-stage Roots pump ACP hPa | <1.10-7 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 |
with rotary vane pump DuoLine hPa | <1.10-7 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 |
with rotary vane pump Pascal hPa | <1.10-7 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 | <1.10-7 | <5.10-10 |
Rotary vane pump Duo 11 M | |||||||||||
Pumping speed backing pump at 50 Hz m3/h | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 |
Weight of puming station1) kg | 67.7 | 67.7 | 69.1 | 72 | 74 | 71.5 | 73.5 | 76.5 | 82.8 | 76.8 | 82.7 |
Power consumption W | 430 | 430 | 430 | 640 | 640 | 640 | 640 | 750 | 750 | 750 | 750 |
Rotary vane pump Duo 20 M | |||||||||||
Pumping speed backing pump at 50 Hz m3/h | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 |
Weight puming station1) kg | 92.7 | 92.7 | 94.1 | 97 | 99 | 96.5 | 98.5 | 101.9 | 107.8 | 101.8 | 107.7 |
Power consumption W | 1030 | 1030 | 1030 | 1240 | 1240 | 1240 | 1240 | 1350 | 1350 | 1350 | 1350 |
Rotary vane pump Pascal 2010 | |||||||||||
Pumping speed backing pump at 50 Hz m3/h | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 | 9 |
Weight of puming station1) kg | 74.7 | 74.7 | 76.1 | 79 | 81 | 78.5 | 80.5 | 83.9 | 89.8 | 83.8 | 89.7 |
Power consumption W | 680 | 680 | 680 | 890 | 890 | 890 | 890 | 1000 | 1000 | 1000 | 1000 |
Rotary vane pump Pascal 2021 | |||||||||||
Pumping speed backing pump at 50 Hz m3/h | 18 | 18 | 18 | 18 | 18 | 18 | 18 | 18 | 18 | 18 | 18 |
Weight of puming station1) kg | 76.7 | 76.7 | 78.1 | 81 | 83 | 80.5 | 82.5 | 85.9 | 91.8 | 85.8 | 91.7 |
Power consumption W | 680 | 680 | 680 | 890 | 890 | 890 | 890 | 1000 | 1000 | 1000 | 1000 |
Multi-stage Roots pump ACP 15 | |||||||||||
Pumping speed backing pump at 50 Hz m3/h | 14 | 14 | 14 | 14 | 14 | 14 | 14 | 14 | 14 | 14 | 14 |
Weight of puming station1) kg | 73.6 | 73.6 | 75 | 77.9 | 79.9 | 77.4 | 79.4 | 82.8 | 88.7 | 82.7 | 88.6 |
Power consumption W | 590 | 590 | 590 | 800 | 800 | 800 | 800 | 910 | 910 | 910 | 910 |
Multi-stage Roots pump ACP 28 | |||||||||||
Pumping speed backing pump at 50 Hz m3/h | 27 | 27 | 27 | 27 | 27 | 27 | 27 | 27 | 27 | 27 | 27 |
Weight of puming station1) kg | 80.6 | 80.6 | 82 | 84.9 | 86.9 | 84.4 | 86.4 | 89.8 | 95.7 | 89.7 | 95.6 |
Power consumption W | 840 | 840 | 840 | 1050 | 1050 | 1050 | 1050 | 1160 | 1160 | 1160 | 1160 |